6 axes positioner
6 axes positioning: Ty, Tz – Translation Tx, Ty mirror- Translation Rx, Rz mirror – Rotation
Resolution :
- Translation: 1 µm
- Rotation: 1,5 µrad
Precision
Translation: 50 µm Rotation: ±100 µrad max
Speed
Ty, Tz: 0,05 mm/s Tx mirror: 0,4 mm/s Ty mirror: 0,3 mm/s Rx mirror: 1 mrad/s Rz mirror: 1,5 mrad/s
Vacuum environment 10-6 mbar
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