Push actuator 02
Micro-positioning linear actuator
- 20: Stroke (mm)
150: Resolution (nm/motor step)
min. 5 steps 200: Axial load (N)
A: Actuator body shape
VS: Secondary vacuum (10⁻⁶ mbar)
Anti-rotation rod
Repeatability <1 µm RMS
Linearity <1%
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