Rx rotation / Fine-tuning
Rx rotation / Fine adjustment
* Travel: ± 3° / Resolution: < 2 µrad / Accuracy: ± 4 µrad
Rotation Rz / Fine adjustment
* Travel: -0.1 to +0.2° / Resolution: 0.1 µrad / Accuracy: ± 1 µrad
Rotation Rs / Fine adjustment
* Travel: -0.1 to +0.2° / Resolution: 0.1 µrad / Accuracy: ± 7 µrad