Rx Rotation / Pre-alignment
Rx Rotation / Pre-alignment
* Travel: ± 2° / Resolution: - / Accuracy: ± 100 µrad
Rotation Rz / Fine adjustment
* Travel: 5 mrad / Resolution: <0.5 µrad / Accuracy: ± 1 µrad
Rotation Rs / Fine adjustment
* Travel: ± 10 rad / Resolution: <0.5 µrad / Accuracy: ± 7 µrad